ZrON® Cryogenic Temperature Sensor
ZrON® cryogenic temperature sensors are not only characterized by high sensitivity, fast thermal response, wide operating temperature range, good thermal cycle repeatability and high mechanical strength, but also have the advantages of low magnetic reluctance, radiation-resistant, and low annual drift, which can be widely used in cryogenic/ultra-low temperature systems, superconducting magnet systems, gas pedals, colliders, synchrotron light sources, advanced light sources, neutron sources, high-energy physics, astronomical telescopes, cosmic microwave background radiation detection and quantum computation.
The temperature sensing unit of the ZrON® cryogenic sensor is a ZrON film grown by reactive magnetron sputtering. By adjusting the ratio of nitrogen oxides in the reactive magnetron sputtering and the growth temperature to regulate the temperature response range of the ZrON film, combined with the advanced lithography technology and encapsulation process, it is capable of realizing the full coverage of the temperature range from 100 mK to 425 K.
ZrON® cryogenic sensors are available in three standard packages, SD, Bobbin and Can, and are classified into four models, ZrON-10, ZrON-50, ZrON-70 and ZrON-80, depending on the resistance range and operating temperature zone. Typical temperature accuracies are: ±5mK@1K; ±5mK @4.2K, ±15mK@77K and ±50mK@300K.
